Wide-view and accurate deformation measurement at microscales by phase extraction of scanning moire pattern with a spatial phase-shifting technique

摘要

A scanning-based second-order moire method is proposed for high-accuracy deformation measurement in a large field of view (FOV) by analyzing the phase distribution of a single-shot scanning moire fringe image using a spatial phase-shifting technique. In this method, the grating pitch can be as small as around one pixel in the scanning moire image to ensure a wide FOV, while high-precision phase measurement is achievable. The strain measurement accuracy has been verified from simulations at different grating pitches, applied strains, and noise levels. The simulation results show that the closer the grating pitch is to the scanning pitch, the smaller the strain measurement error, and the recommended pitch ratio is 0.9 similar to 1.1. Furthermore, the feasibility of this method has been verified from a tensile experiment on an aluminum specimen under a laser scanning microscope with scanning moire images recorded. The microscale strains of aluminum measured at different tensile loads agree well with the strain gauge results. As an integration of the scanning and sampling moire methods, this method has the advantages of a large FOV, high accuracy, strong noise immunity, and visualization of magnified deformation. Compared with the traditional phase-shifting scanning moire method, this method only needs to record a single scanning moire image and is suitable for dynamic deformation analysis. (C) 2021 Optical Society of America