Simultaneous phase-shifting interferometer with a monitored spatial light modulator flexible reference mirror

摘要

A simultaneous phase-shifting interferometer with a monitored spatial light modulator (SLM) flexible reference mirror is proposed to balance the flexibility and accuracy of aspheric-surface in-process measurements. In this method, polarization simultaneous phase-shifting camera systems are applied to reduce the influence of environmental vibrations on the in-process measurements. An SLM reference mirror is employed to improve the flexibility of in-process measurements. A device is integrated to monitor the SLM surface in order to improve measurement accuracy caused by the spatial phase nonuniformity and modulation instability of the SLM. Thus, the SLM surface is monitored and the aspheric surface is measured simultaneously in only one interferometer, which presents the advantages of a compact structure and simple calibration. A flat acrylic mirror with an unknown surface figure error is measured by the proposed interferometer. Cross tests demonstrate the feasibility of this interferometer. (C) 2021 Optical Society of America