Low insertion loss silicon-based spatial light modulator with high reflective materials outside Fabry-Perot cavity

著录项

• 来源
  《中国物理：英文版》 |2019年第10期|424-429|共6页
• 作者

  Li-Fei Tian; Ying-Xin Kuang; Zhong-Chao Fan; Zhi-Yong Li;

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• 作者单位

  State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China;

  Engineering Research Center for Semiconductor Integrated Technology Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China;

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• 正文语种 eng
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