Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

摘要

A process flow is described for the low cost, flexible fabrication of metal micro-electromechanical systems (MEMS) with high performance integrated sensing. The process is capable of producing new designs in approximate to 1 week at an average unit cost of <$1 k/device even at batch sizes of .approximate to 1-10, with expected sensing performance limits of about 135 dB over a 10 kHz sensor bandwidth. This is a approximate to 20x reduction in cost, approximate to 25 x reduction in time, and potentially >30x increase in sensing dynamic range over comparable state-of-the-art compliant nanopositioners. The nonlithographically based microfabrication (NLBM) process is uniquely suited to create high performance nanopositioning architectures which are customizable to the positioning requirements of a range of nanoscale applications. These can significantly reduce the cost of nanomanufacturing research and development, as well as accelerate the development of new processes and the testing of fabrication process chains without excess capital investment. A six degrees-of-freedom (6DOF) flexural nanopositioner with integrated sensing for all 6DOF was fabricated using the newly developed process chain. The fabrication process was measured to have approximate to 30 mu m alignment. Sensor ann, flexure, and trace widths of 150 mu m, 150 mu m, and 800 mu m, respectively, were demonstrated. Process capabilities suggest lower bounds of 25 mu m, 50 mu m, and 100 mu m, respectively. Dynamic range sensing of 52 dB was demonstrated for the nanopositioner over a 10 kHz sensor bandwidth. Improvements are proposed to approach sensor performance of about 135 dB over a 10 kHz sensor bandwidth.