A low-noise readout interface for silicon MEMS vibratory gyroscope

摘要

This paper proposes a novel readout interface for a high-precision silicon MEMS vibratory gyroscope. The readout interface contains a closed-loop self-resonating driving circuit and a low-noise open-loop capacitance sensing circuit. In order to achieve an overall optimization in noise performance, the noise in driving loop of the interface is analyzed in detail. After the noise optimization, the driving frequency stability achieves 0.93 ppm, the front-end capacitance resolution achieves 0.002 aF/p Hz. The total zero bias instability achieves 3:82ffi/h,