X-Ray Tomography as a Diagnostic Method of X-Ray Refractive Optics

摘要

This article describes the application of high-resolution X-ray computed tomography to assess the critical parameters of refractive lenses for X-ray optics that determine the quality of compound optical systems. A microfocus Y. Cheetah X-ray system has been used for three-dimensional visualization of the surface and internal structure of refractive lenses made of high-purity aluminum with geometric apertures of 500 and 1500 mu m. A Fein Focus X-ray tube with a focal spot size of less than 2 mu m provides the resolution necessary for detecting critical-size microstructure defects in the material of the lens.