Microfabrication of Monolithic Microfluidic Platforms Using Low Temperature Co-Fired Ceramics Suitable for Fluorescence Imaging

摘要

In this work, the influence of laser ablation and lamination parameters in the fabrication of embedded microstructures using Low Temperature Co-Fired Ceramics, have been studied. First, the influence of laser ablation parameters in the dimensions of fabricated microchannels in Low Temperature Co-Fired Ceramics substrates was characterized and strategies for tailoring the microchannels aspect ratios are described. The influence of lamination conditions on the fabrication of monolithically embedded microstructures is presented. Thereafter, a ceramic microfluidic platform, was constructed using a multilayer approach. The ceramic micro-fluidic platforms incorporate three independent inlet channels and a microfluidic chamber with an monolithically integrated transparent optical windows. The construction procedure used ensures monolithic ceramic devices with homogeneous surface chemistry as well as homogeneous physical properties. Fluorescence dyes were used in order to characterize the hydrodynamic focusing as a function of flow rate ratio of the microfluidic chamber inlets. The results obtained open the possibility of studying chemical process, in static or flow conditions using fluorescence imaging, within the traditional fields of LTCC technology, such as high-temperature or organic solvents applications, while using a simple fabrication procedure suitable for low cost mass production.