Ultrathin Highly Flexible Featherweight Ceramic Temperature Sensor Arrays

摘要

We fabricated highly flexible Sr- and Ni-doped perovskite SmMnO3 thermistor film sensor arrays on an ultrathin (5 mu m thick) and lightweight (21 mg) polyimide sheet for healthcare monitoring devices. The Ag nanowire and nanoparticle-impregnated carbon microcone array, which was prepared by precisely controlled surface laser carbonization of polyimide, showed sufficiently low resistance as a bottom electrode and good stability against sharp bending angles. The dot-shaped (diameter: 900 mu m) perovskite thermistor film with a thickness of 900 nm was crystallized by pulsed ultraviolet laser irradiation of a precursor film printed with perovskite nanoparticle dispersion ink, and the film functioned well as the thermistor with a thermistor constant of 2820 K. The thermistor sensor sheet exhibited rapid responses to temperature variation and high stability in the temperature cycle tests over 1000 cycles between room temperature and 80 degrees C. The bending durability for a bending angle of 60 degrees with a small bending radius (500 mu m) was also high. During the bending test over 1000 cycles, the monitoring temperature variation was suppressed only within 0.1 degrees C. This ultrathin sensor array sheet can be mounted on surfaces with shape variations, and we used the sensor for real-time monitoring in healthcare to detect precise temperature variations on the human skin during physical exercise.