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首页> 外文期刊>CERAMICS INTERNATIONAL >Research on the machinability of A-plane sapphire under diamond wire sawing in different sawing directions
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Research on the machinability of A-plane sapphire under diamond wire sawing in different sawing directions

机译:不同锯切方向金刚石锯下飞机蓝宝石的可加工性研究

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Due to its superior mechanical, optical and chemical properties, sapphire (alpha-Al2O3) is widely used in engineering, optics, medicine, and other scientific research fields. The atomic structure of sapphire gives rise to anisotropy in its mechanical properties, which affects the machinability of sapphire materials on different crystal planes. Different cutting directions will affect the wafer economy and surface quality achieved during wire sawing due to this anisotropy. In this study, the machinability of A-plane sapphire was investigated for diamond wire sawing in three different directions, following the C-plane, R-plane and M-plane. The results show that the direction following the M-plane could be the best direction for diamond wire sawing because this direction results in the minimal sawing forces, the lowest specific energy and the smallest volume of material that will need to be removed during subsequent processing. These characteristics correspond to the direction with the highest fracture strength since the material is removed by brittle machining. The force ratio for sawing in the direction of the R-plane is the smallest because this direction is associated with the minimum hardness and the lowest critical load for the transition from plastic to brittle removal of the workpiece material. The 3D height parameters show no obvious pattern among the three sawing directions. The mechanism of material removal is mainly brittle removal, with some plastic removal, and is obviously affected by the crystal orientation.
机译:由于其优越的机械,光学和化学性质,蓝宝石(Alpha-Al2O3)广泛用于工程,光学,医药和其他科学研究领域。蓝宝石的原子结构在其机械性能下产生各向异性,这影响了蓝宝石材料在不同的水晶平面上的可加工性。由于这种各向异性,不同的切割方向会影响晶圆经济和在线锯切期间实现的表面质量。在该研究中,在C面,R平面和M平面之后,研究了三种不同方向的金刚石线锯的钻石线锯的可加工性。结果表明,M平面之后的方向可以是金刚石锯切的最佳方向,因为该方向导致最小的锯切力,最低的特定能量和最小的材料在随后的加工期间需要去除的最小材料。这些特性对应于具有最高断裂强度的方向,因为通过脆加工除去材料。在R平面方向上锯切的力比最小,因为该方向与从塑料过渡到从塑料转换到工件材料的脆性的最小硬度和最低临界负荷。 3D高度参数在三个锯点方向上没有明显的模式。材料去除机制主要是脆的去除,一些塑料去除,并且明显受晶体取向的影响。

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