Synthesis of Ti2AlC & Ti3AlC2 MAX phases by Arc-PVD using Ti-Al target in C2H2/Ar gas mixture and subsequent annealing

摘要

MAX phases are appropriate protective coatings due to their unique properties such as excellent corrosion resistance. In this study, Ti-Al-C coatings with different percentages of Ti, Al and C were deposited on stainless steel and quartz glass substrates by Arc-PVD using two different Ti-Al alloy targets with (1:1) and (1:2) atomic ratios in C2H2/Ar atmosphere with various ratios (1/10, 1/4, 1/2). Then, the coated substrates were annealed in a vacuum furnace at different temperatures between 600 and 1000 degrees C. The results of XRD analysis indicated that Ti2AlC MAX phase is generated from 1Ti-2Al target, while Ti2AlC and Ti3AlC2 MAX phases are produced from 1Ti-1Al target by annealing at temperatures above 800 degrees C. Based on the results of this study, the best C2H2/Ar ratio in the Arc-PVD atmosphere for the synthesis of MAX phases was 1/4. Raman spectroscopy and XPS confirmed the presence of the MAX phases in the coatings. EDS analysis showed that the overall compositions occur within the regions in the ternary phase diagram in which the MAX phases are stable.