Implantation-plasma treatment of martensite steel and titanium alloy

摘要

Surface of martensite 12Cr-2Mo-Mn steeland titanium alloy Vt-18U were irradiated with 40keVN+ ions and nitrogen plasma flow. It was shown thatpreliminary 30keVN2+ ion implantation and subsequentplasma treatment increase of nitrogen penetration inthe materials more then an order of magnitude comparedto theoretical ion range, the microhardness beingincreased in 3 and 1.8 times for steel and titaniumalloy correspondingly. A X-ray amorphous layer nearthe steel surface is formed as a result ofimplantation-plasma treatment. In titanium alloy δ-phase of TiN was observed. Deep penetration ofnitrogen atoms is explained by their repulsiveinteraction, which results to appearance of the forceacting on the atoms and directed toward the deep in.This interaction is effective at high(>1 at.%) concentration of implanted atoms.