We have developed an uncooled micro bolometer for micro infrared spectroscopy. The electrical lead that is only made of single crystalline silicon is proposed as the sensing element of the bolometer. This lead functions both as the absorber, and as the temperature-sensitive resistor. Single crystalline silicon is a suitable material, because SOI (Silicon on Insulator) wafers can be used. Since the fabrication is compatible with IC processes, low-costs and stable infrared sensors can be realized. A micro bolometer has been realized with a specific detectivity of D* (500K, 10 Hz, 1 Hz) =1.1 × 10{sup}8 cmHz{sup}(1/2)/W at bias voltage 9.0 V. The length of resistor is 10 mm.
展开▼
