Electrostatic problems in cleanroom production area

摘要

This paper is consisting of the Electrostatic phenomena related to the Semiconductor production process. At first, the present situation of ESD problems occurred in the electronics industries and the outline of mechanisms of electrostatic charge are described. Then, a case of the less reliable air ionization in the clean room is described. The dry air can be charged easily during pass through an insulation material piping and it is explained by the experimental result of the electrification phenomenon. Electrostatic potential of ultra-pure water is observed when the de-ionized pure water flown into the cleaning bath of the wet cleaning machine. It is possible to decrease the potential to be 0 volt, when grounding the charged ultra-pure water by mean of the fine copper wire and also it is possible to control the electrostatic potential less than -20 volts by mean of grounding the non-contacted copper wire netting wrapped around the piping.