Accurate measurements of the acoustical physical constants of synthetic quartz for SAW devices

摘要

In this study, all the independent components of the acoustical physical constants of commercially available synthetic quartz, which is widely used for SAW devices, are determined by measuring the longitudinal and shear velocities, dielectric constants, and density. Three principal and several rotated Y-cut specimens selected through theoretical calculations are prepared from one crystal ingot for determining the constants and for confirming its accuracy. We compare the measured velocities for the specimens that are not used to determine the constants with the calculated values using the determined constants. The velocity differences are less than ±0.2 m/s (±0.004%).