Semiconductor accelerometer for automitive applications

摘要

In recent years, safety device such as ABS (Antilock Brake System) or car navigation system has been spread in the automotive market. Therefore, demand is growing for the accelerometer capable of detecting the DC signal components associated with small acceleration levels of around 9.8m/s{sup}2 (1G). Now, a mono-axial piezoresistive accelerometer device which is small-sized and high-sensitive has been developed. Made by micromachining SOI (Silicon on Insulator) wafers, the device is 3.3mm long, 2.6mm wide and 1.4mm thick. Sensitivity is 1.33mV· s{sup}2/m (13mV/G) with a 5V bias voltage. Good temperature and frequency characteristics were also achieved.