High-speed high-accuracy three-dimensional measuring system using phase-shift method

摘要

In three-dimensional measurement technology based on phase-shifted light pattern projection, the problem of detecting the position of a sinusoidal pattern (the so-called phase connection problem) typically encountered when measuring an object with a step or hole has been solved by developing an algorithm that performs labeling processing on a striped binary pattern appearing every 1/2 phase in the phase image by using phase recovery reliability. Use of this method makes previous{y required additional equipment such as auxiliary patterns or reference planes unnecessary and enables high-speed and high-accuracy phase-shifted light-pattern three-dimensional measurement requiring only a pattern projector, camera and image processor. A measurement experiment using a sample electronic circuit board has demonstrated the effectiveness of this method after confirming the potential for high-accuracy measurement down to 10 μm resolution even on objects with discontinuous planes.