We report a MEMS(Micro-Electro-Mechanically-Systems)based high speed wavelength swept NIR(Near Infrared)VCSEL(Vertical-Cavity Surface-Emitting-Laser)source operating at 1050 nm wavelength range for the SS-OCT(swept-source optical-coherence-tomography)application.An electrically pumped half-VCSEL with a semiconductor bottom DBR(Distributed Brag Reflector)is used for its superior reliability and simple optical configuration as a light source.The developed tunable VCSEL is composed of silicon on insulator; SOI-MEMS based diaphragm mirror with a high reflective dielectric coating, and is mounted by the thermo-compression bonding of gold onto a half-VCSEL chip with strained InGaAs multi-quantum wells gain medium.Wavelength tuning range over 88 nm is achieved by mechanical means.This tuning range corresponds to 8.3%tuning ratio which is currently a record for electrically pumped tunable VCSELs.We also explained its application in SS-OCT sensing.
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