Sintering of AlN with Yb_2O_3 Additive by Millimeter-wave Heating

摘要

Rapid sintering of aluminum nitride was performed with the 28GHz millimeter-wave heating. It was found that full densification was attained for 5 wt percent Yb_2O_3-added aluminum nitride sintered at 1650 deg C for 20 min., while for 3 wt percent Yb_2O_3-added aluminum nitride sintered at 1750 deg C. Thermal conductivity over 170W/m centre dot K was obtained in the 5 wt percent Yb_2O_3-added aluminum nitride sintered at 1600 deg C for 60min. under 1atm nitrogen atmosphere and the 3 wt percent Yb_2O_3-added aluminum nitride sintered at 1750 deg C, respectively. Rapid and low temperature sintering of aluminum nitride by millimeter-wave heating is attributed to the predominantly effective absorption of millimeter-wave into additive rare-earth oxides.