Facile Method for Modulating the Profiles and Periods of Self-Ordered Three-Dimensional Alumina Taper-Nanopores

摘要

We report a facile nanofabrication method, one-step hard anodizing and etching peeling (OS-HA-EP) of aluminum foils followed by multistep mild anodizing and etching pore-widening (MS-MA-EW), for the controllable tailoring of hexagonally packed three-dimensional alumina taper-nanopores. Their profiles can be precisely tailored by the synergistic control of anodizing time, etching time and cyclic times at the MS-MA-EW stage, exemplified by linear cones, whorl-embedded cones, funnels, pencils, parabolas, and trumpets. Meantime, their periods can also be modulated in the range of 70—370 nm by choosing matched anodizing electrolytes (e.g., H2C2O4, H2SO4, H2C2O4-H2SO4, and H2C2O4-C2H5OH mixture) and anodizing voltages at the OS-HA-EP stage. We also demonstrated that the long-range ordering of nanopits and the peak voltage of stable self-ordered HA, which are unachievable in a single H2C2O4 electrolyte system, can be effectively tuned by simply adding tiny quantity of H2SO4 and C2H_sOH to keep an appropriate HA current density, respectively. This method of using the combination of simple pure chemical nanofabrication technologies is very facile and efficient in realizing the controllable tailoring of large-area alumina membranes containing self-ordered taper-nanopores. Our work opens a door for exploring the novel physical and chemical properties of different materials of nanotaper arrays.