High-quality imaging in environmental scanning electron microscopy - optimizing the pressure limiting system and the secondary electron detection of a commercially available ESEM

摘要

In environmental scanning electron microscopy applications in the kPa regime are of increasing interest for the investigation of wet and biological samples, because neither sample preparation nor extensive cooling are necessary. Unfortunately, the applications are limited by poor image quality. In this work the image quality at high pressures of a FEI Quanta 600 (field emission gun) and a FEI Quanta 200 (thermionic gun) is greatly improved by optimizing the pressure limiting system and the secondary electron (SE) detection system. The scattering of the primary electron beam strongly increases with pressure and thus the image quality vanishes. The key to high-image quality at high pressures is to reduce scattering as far as possible while maintaining ideal operation conditions for the SE-detector. The amount of scattering is reduced by reducing both the additional stagnation gas thickness (aSGT) and the environmental distance (ED). A new aperture holder is presented that significantly reduces the aSGT while maintaining the same field-of-view (FOV) as the original design. With this aperture holder it is also possible to make the aSGT even smaller at the expense of a smaller FOV. A new blade-shaped SE-detector is presented yielding better image quality than usual flat SE-detectors. The electrode of the new SE detector is positioned on the sample table, which allows the SE-detector to operate at ideal conditions regardless of pressure and ED.