Parallelism adjustment between welding head and sample in ultrasonic nanowelding

摘要

Polydimethylsiloxane (PDMS) membrane was used to adjust the parallelism between welding head and sample in ultrasonic nanowelding. The feasibility of the PDMS adaptive adjustment was studied theoretically and experimentally. The theoretical simulation shows that the parallelism is improved by the elastic deformation of PDMS and the stress applied to the sample tends to disperse on the sample surface. In addition, there is hardly ultrasonic energy loss during wave transmission from PDMS. The field emission measurements demonstrate that a sample welded with PDMS has a good current stability due to the improved parallelism.