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On Optimization of Manufacturing of Field-Effect Heterotransistors Framework Circuit, Including into Itself Two Coupled Logical Element XOR, to Increase Their Density

机译:优化现场效应异质校验器框架电路的制造,包括两种耦合逻辑元素XOR,以增加它们的密度

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摘要

In this paper we introduce an approach to increase density of field-effect heterotransistors framework a circuit, including into itself two coupled logical element XOR. At the same time one can obtain decreasing of dimensions of the above transistors. Dimensions of the elements willbe decreased due to manufacture heterostructure with specific structure, doping of required areas of the heterostructure by diffusion or ion implantation and optimization of annealing of dopant and/or radiation defects.
机译:在本文中,我们介绍了一种提高现场效应异质校验器框架密度的方法,包括自身两个耦合逻辑元件XOR。 同时,可以获得上述晶体管的尺寸的减小。 由于制造具有特异性结构的异质结构,通过扩散或离子注入,通过扩散或离子植入掺杂,通过扩散和/或辐射缺陷的退火的优化来降低元素的尺寸。

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