Synthesis of Diamond from a High-Velocity Microwave Plasma Flow

摘要

A new method of gas-phase diamond deposition with a high-velocity jet used to transport gases activated in microwave plasma to a substrate is developed. Diamond was synthesized from a mixture of hydrogen with the addition of 1% methane. The deposition rate (78 mu m/h) was more than an order of magnitude higher than that achieved earlier in experiments with activation of similar initial mixtures in microwave plasma.