Effect of Er incorporation on structural and element distribution of Zr alloyed layers prepared using double glow plasma surface alloying

摘要

A special target structure for erbium (Er)-zirconium (Zr) co-deposition is proposed, based on the hollow cathode effect. To study the effect of rare earth on the alloyed layer, Zr-Er alloyed layers with different quantity proportion of Er and Zr elements were prepared on Ti-based substrate using double glow plasma surface alloying. The microstructure and composition of the alloyed layers were analysed by XRD and SEM-EDS. Results showed that Er element grows perpendicular to the Ti-based substrate in the alloyed layers, and it was found that the growth structure had an opposite effect on the diffusion of the Zr element. Interestingly, as the concentration of Er element increases, the addition of Er element to a certain extent affects the crystallisation of the Zr-Er alloyed layer and reduces the diffusivity of the Zr element.