Deterministic polishing of freeform optical surface by iterative intersection tool path in an off-axial three-mirror anastigmat imaging system

摘要

Deterministic polishing as the final step of freeform surface machining can acquire preferable form accuracy. In this article, a deterministic polishing model based on iterative intersection tool path is presented to meet the requirement of high-form accuracy in freeform surface. In the polishing process, on-machine measurement and point set registration method are adopted for installation error extraction and form error calculation. The iterative polishing can be finished without discharging of workpiece by on-machine measurement strategy, which will reduce the processing time and improve the machining efficiency. In addition, a boundary extension method is employed to diminish the surface edge collapse generated by edge effect. Finally, the polishing experiment of freeform optical surface in an off-axial three-mirror anastigmat imaging system is conducted to verify the effectiveness of the proposed model.