Silicon‐Based Photonic Architectures from Hierarchically Porous Carbon Opals

摘要

Abstract >Silicon‐based materials are needed in cutting‐edge technological fields, for which hierarchical porosity and photonic properties help improve performance. In this work, the versatility of several fabrication routes that combine silicon infiltration by chemical vapor deposition (CVD), reactive ion etching (RIE), and carbon calcination, which produce a palette of novel silicon‐based material architectures, is demonstrated. Design strategies are discussed and the main features of the processing steps are addressed to provide a variety of new silicon‐based materials with high morphological versatility and photonic quality. Three‐dimensional hollow carbon opals (HCO) permit control of the porosity of subsequent architectures through the initial silicon infiltration, while open or closed surfaces are achieved primarily as a function of RIE conditions. The composition of derived structures depends on the sequence in which the processes are applied. As a result, pure Si and hybrid C–Si inverse structures can be produced with open or closed spheres in the top layer and with an optional passivation layer. Remarkably, by properly choosing the Si infiltration parameters and the calcination/RIE procedure, final structures are achieved with double‐shell spheres. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> 在尖端技术领域中需要基于硅基材料，其中层次孔隙率和光子性能有助于提高性能。在这项工作中，通过化学气相沉积（CVD），反应离子蚀刻（RIE）和碳煅烧的几种制造路线的多功能性，其产生新型硅基材料架构的调色板。讨论了设计策略，并解决了处理步骤的主要特征，以提供各种具有高形态学和光子质量的新型基于硅基材料。三维中空碳粉状（HCO）允许通过初始硅渗透控制随后的架构的孔隙率，而打开或封闭表面主要是作为RIE条件的函数实现的。衍生结构的组成取决于应用过程的序列。结果，纯Si和混合C-Si逆结构可以用顶层和可选的钝化层在顶层和闭合球中产生。值得注意的是，通过适当地选择SI渗透参数和煅烧/ RIE过程，使用双壳球体实现最终结构。</ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-28901/'>《Particle & Particle Systems Characterization: Measurement and Description of Particle Properties and Behavior in Powders and Other Disperse Systems》</a> <b style="margin: 0 2px;">|</b><span>2020年第1期</span><b style="margin: 0 2px;">|</b><span>共9页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/6960.html" title="特种结构材料">特种结构材料;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=carbonaceous materials&option=203" rel="nofollow">carbonaceous materials;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=photonic materials&option=203" rel="nofollow">photonic materials;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=RIE&option=203" rel="nofollow">RIE;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=self‐assembly and templating&option=203" rel="nofollow">self‐assembly and templating;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=silicon CVD&option=203" rel="nofollow">silicon CVD;</a> </p> <div class="translation"> 机译：碳质材料;光子材料;RIE;自组装和模板;硅CVD; </div> </li> </ul> </div> </div> <div class="literature cardcommon" id="literaturereference" style="display:none"> <div class="similarity "> <h3 class="all_title" id="enpatent111">引文网络</h3> <div class="referencetab clearfix"> <ul id="referencedaohang"> <li dataid="referenceul">参考文献</li> <li dataid="citationul">引证文献</li> <li dataid="commonreferenceul">共引文献</li> <li dataid="commoncitationul">同被引文献</li> <li dataid="tworeferenceul">二级参考文献</li> <li dataid="twocitationul">二级引证文献</li> </ul> </div> <div class="reference_details" id="referenceList"> <ul id="referenceul"></ul> <ul id="citationul"></ul> <ul id="commonreferenceul"></ul> <ul id="commoncitationul"></ul> <ul id="tworeferenceul"></ul> <ul id="twocitationul"></ul> </div> </div> </div> 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class="tuijian_auth tuijian_authcolor"> . 杨正文</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=宋志国&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,宋志国</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=余雪&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor">,余雪</a> <span> <a href="/conference-cn-10729/" target="_blank" rel="nofollow" class="tuijian_authcolor"> . 首届云南省科协学术年会 </a> <span> <span> . 2011</span> </span> </div> </li> <li> <div> <b>7. </b><a class="enjiyixqcontent" href="/academic-degree-domestic_mphd_thesis/020314121441.html">硅基纳米发光材料—多孔硅的制备工艺及多孔硅光子晶体的研究</a> <b>[A] </b> <span> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=柳毅&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 柳毅</a> <span> . 2003</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/06120110718866.html">大面积反蛋白石光子晶体多孔薄膜的制备方法</a> <b>[P]</b> . <span> 中国专利： CN108254807A </span> <span> . 2018-07-06</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/061203146820.html">一种曲面结构的蛋白石光子晶体和分子印迹聚合物反蛋白石薄膜的制备方法</a> <b>[P]</b> . <span> 中国专利： CN106929915B </span> <span> . 2019.01.11</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130429138751.html">Hierarchical porous material comprises at least two spherical elementary particles, where the at least one of the spherical particles comprises a mesostructured silicon oxide based matrix</a> <b>[P]</b> . <span> 外国专利：  FR2920756A1 </span> <span> . 2009-03-13</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：分层多孔材料包括至少两个球形基本颗粒，其中至少一个球形颗粒包括介孔结构的氧化硅基基质 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130429138752.html">Hierarchical porous material, useful to prepare absorbent and catalyst, comprises two spherical elementary particles, where at least one of the spherical particles comprise a silicon oxide based matrix and having amorphous walls</a> <b>[P]</b> . <span> 外国专利：  FR2920755A1 </span> <span> . 2009-03-13</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于制备吸收剂和催化剂的分层多孔材料包含两个球形基本颗粒，其中至少一个球形颗粒包含氧化硅基基质并具有无定形壁 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130429138749.html">Hierarchical porous material, useful to prepare absorbent and catalyst, comprises two spherical elementary particles, where at least one of the spherical particles comprise a silicon oxide based matrix and having crystallized walls</a> <b>[P]</b> . <span> 外国专利：  FR2920758A1 </span> <span> . 2009-03-13</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于制备吸收剂和催化剂的分级多孔材料包含两个球形基本颗粒，其中至少一个球形颗粒包含氧化硅基基质并具有结晶壁 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" onclick="ywcd('0704024384473','4',7,2,1,'',this,24)" class="delivery" prompt="010401" title="通过人工服务将文献原文发送至邮箱" >获取原文</div> <div class="journalsub-pop-up" style="display: none"> <div class="journal-sub"> <h2>期刊订阅</h2> <img src="https://cdn.zhangqiaokeyan.com/img/loginclose.png" alt="关闭" 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