首页> 外文期刊>SID International Symposium: Digest of Technology Papers >Single Array Nozzle Source Method for Homogeneous Mixed Organic Thin Film and Low Mask Shadow in 6GH AMOLED Mass Production
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Single Array Nozzle Source Method for Homogeneous Mixed Organic Thin Film and Low Mask Shadow in 6GH AMOLED Mass Production

机译:单阵列喷嘴源法用于均匀混合有机薄膜和6GH amoled批量生产中的低掩模阴影

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摘要

We have developed Single Array Nozzle source (SAN source) organic thin film deposition method for 6G half size AMOLED mass production. The special feature of SAN source set is all of nozzles are arranged in one single line even if when we make 3 material mixed thin film. And the distance within each edge nozzle of SAN source is shorter than substrate size. We expect than SAN source set can improve homogeneity of mixed thin film and resolution of AMOLED pixel.
机译:我们开发了单阵列喷嘴源(SAN源)有机薄膜沉积方法,可实现6G半尺寸的Amoled批量生产。 即使当我们制作3个材料混合薄膜时,San Source Set的特殊特点也是单线布置在一个单线中。 并且SAN源的每个边缘喷嘴内的距离比基板尺寸短。 我们预期比SAN源集可以提高混合薄膜的均匀性和AMOLED像素的分辨率。

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