In situ deposition of highly C-axis oriented lanthanum modified lead titanate thin films by multi-ion-beam reactive co-sputtering technique

摘要

Highly c-axis oriented La-modified PbTiO_3 (PLT) thin films were in situ grown on Pt(100)/MgO(100) and MgO(100) substrates by multi-ion-beam reactive co-sputtering (MIBRECS) technique at the substrate temperature range of 450 °C-540 °C. The orientation degree α of the films is more than 90%. The chemical composition is in good agreement with the designed one and is almost uniform across the surface of the substrates. The remanent polarization (P_r) and coercive field (E_c) were found to be 5.3 μC/cm~2 and 78 kV/cm, respectively.