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Femtosecond pulsed laser-induced interconnection of single-walled carbon nanotubes

机译:飞秒脉冲激光诱导的单壁碳纳米管互连

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With the development of electronic information technology, the fabrication of transistors based on bulk (3D) semiconductor materials has encountered bottlenecks. In view of this situation, many researchers have focused on manufacturing two-dimensional nanostructures from one-dimensional nanomaterials to apply to transistors. Based on the experimental platform of femtosecond pulsed laser irradiation system, one-dimensional single-walled carbon nanotubes (SWCNTs) deposited on silica substrate were induced to interconnect, and the optimal process parameters of the interconnection were explored. Then compared with randomly distributed SWCNTs films, the square resistance of SWCNTs films after interconnection was significantly reduced, which provided inspiration for the subsequent preparation of high-performance carbon-based thin film transistors.
机译:随着电子信息技术的发展,基于散装(3D)半导体材料的晶体管的制造具有令人遇到的瓶颈。 鉴于这种情况,许多研究人员专注于制造来自一维纳米材料的二维纳米结构以施加到晶体管。 基于飞秒脉冲激光照射系统的实验平台,诱导沉积在二氧化硅基板上的一维单壁碳纳米管(SWCNTs)互连,探索了互连的最佳过程参数。 然后与随机分布的SWCNT膜进行比较,互连后SWCNT薄膜的方形电阻显着降低,这为随后的高性能碳基薄膜晶体管提供了灵感。

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