LARGE AREA AUTOMATED DEPROCESSING OF INTEGRATED CIRCUITS: PRESENT AND FUTURE

摘要

Previous research has demonstrated the fundamental workflows to achieve large area automated deprocessing of integrated circuits (ICs). This article reviews recent achievements and discusses present limitations of this type of deprocessing. It also describes future integrated circuit deprocessing tool development related to purpose-built laboratory-based hardware and synchrotron-based instrumentation. The emphasis here is on hardware, hardware configurations, and both hyperspectral and rapid image data acquisition methods. Processes related to data reduction to net list are not covered in this article.