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机译:利用射频反应磁控溅射,通过锂掺杂增强ZnO膜的沉积
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
RMIT Univ Sch Elect &
Comp Engn Melbourne Vic 3001 Australia;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
zinc oxide; thin films; doping; deposition; magnetron sputtering;
机译:利用射频反应磁控溅射,通过锂掺杂增强ZnO膜的沉积
机译:射频磁控溅射在石英衬底上室温沉积Al掺杂ZnO膜及其热退火效应
机译:并五苯薄膜晶体管的源/漏电极用射频磁控溅射沉积铝掺杂的ZnO薄膜
机译:通过射频磁控溅射沉积的纯度和掺杂ZnO薄膜的光谱椭圆形研究
机译:使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
机译:射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
机译:射频磁控溅射在石英衬底上室温沉积Al掺杂ZnO膜及其热退火效应