Dynamic Analysis of Bistable Inductive Micro-Switch

摘要

Inductive micro-switch is an integrative device of a sensor and actuator. Its malfunctions related to "fail-to-closure" and "transient-closure" result in low reliability and weak anti-jamming capability. A new bistable inductive micro-switch is presented based on micro electro-mechanical system (MEMS) technology. A sine rough surface model is used to describe the random distribution of the rough adhesive surface. Micro size Casimir and van der Waals (vdW) forces are analyzed in detail. The vdW force includes the repulsive force. Dynamic simulation results are shown to be in agreement with experimental results. The threshold acceleration was 6.8 g, and the response time was 17.5 μs. A "double-snap-back" phenomenon in the Off-state is discovered.