Electrochemical discharge machining of soda lime glass for MEMS applications

摘要

Electrochemical discharge machining (ECDM) is a process to fabricate micro-features in electrically non-conductive materials like glass, ceramics, etc. These micro-features are useful in the field of microfluidics and micro-electromechanical system (MEMS) packaging. The present study includes the experimental analysis of effects of process parameters such as applied voltage and duty ratio on the machining process. Top and bottom holes diameters are the primary focus in this analysis. Structural characterisation of drilled micro-holes was performed using optical microscopes and scanning electron microscope (SEM) to analyse the surface quality. Energy dispersive X-ray spectroscopic (EDS) analysis of machined glass and needle tool after machining has been performed. An increase in hole diameter was obtained with increment in duty ratio and applied voltage. However, machining results were found to be random at extreme value of 70% duty ratio. Heat affected zone was found to be severe in higher applied voltage and duty ratio. EDS analysis of tool shown the different constituents of debris deposited on it.