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A tool-based hybrid laser-electrochemical micromachining process: Experimental investigations and synergistic effects

机译:基于工具的混合激光电化学微机械加工过程:实验研究和协同效应

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This paper proposes a novel tool-based hybrid laser-ECM process which exploits synergy of laser and electrochemical process energies along the same machining axis, thereby enhancing the potential of both processes while compensating and minimizing their limitations. This process combines features from jet-ECM and water jet guided laser processes into a new micromachining process. In this study, details of this tool-based hybrid laser-electrochemical micromachining process are presented and an experimental study on process-material interaction is performed using Inconel IN718 as workpiece material. According to the experimental results, material removal rates of the order of 0.6 mm(3)/min are obtained. It has been observed that while the process response is material-dependent as well as ECM parameter dependent, the effective laser pulse energy reaching the workpiece surface is the main factor influencing the surface characteristics. Additionally, the electrolyte flow rate affects material removal and also influences laser coupling into the tool-electrode. It has been observed that within a specific process window i.e. pulse-energy 30-45 mu J, flow rate 32-48 ml/min, IEG 20-30 mu m, voltage 20-25 V; high quality surfaces are observed with less defects. At pulse energies higher than 60 mu J, the process speed becomes higher but the surface becomes rough due to combined material removal mechanisms taking place. Furthermore, metallographic investigations on the machined surface reveal presence of multiple removal mechanisms such as laser removal, laser assisted electrochemical removal and electrochemical removal depending on the applied laser pulse energy. Overall, this study has shown that hybrid laser-electrochemical micromachining has a high potential to machine advanced metallic alloys with conductivity variations even for high aspect ratio features and needs further research developments.
机译:本文提出了一种新型工具的混合激光激光ECM过程,其利用相同加工轴利用激光和电化学工艺能量的协同作用,从而增强了两个过程的电位,同时补偿和最小化了它们的限制。该过程将Jet-ECM和水射流引导激光工艺的特征与新的微加工过程中的功能相结合。在本研究中,提出了该工具的混合激光电化学微加工过程的细节,并使用In718作为工件材料来执行对工艺 - 材料相互作用的实验研究。根据实验结果,获得0.6mm(3)/ min的材料去除率。已经观察到,虽然过程响应是依赖的材料以及ECM参数依赖性,但达到工件表面的有效激光脉冲能量是影响表面特性的主要因素。另外,电解质流速影响材料去除并影响激光耦合到工具电极中。已经观察到,在特定的过程窗口中,在脉冲 - 能量30-45μm,流速32-48mL / min,IEG20-30μm,电压20-25V;观察到高质量的表面,缺陷较少。在高于60μm的脉冲能量下,处理速度变得更高,但由于采取组合的材料去除机制,表面变得粗糙。此外,加工表面上的金相研究显示了根据所施加的激光脉冲能量的激光去除,激光辅助电化学除去和电化学移除的多种去除机构。总体而言,该研究表明,混合激光电化学微机电具有高潜力,即使对于高纵横比特征,也能够进行导电变化的先进金属合金,并且需要进一步的研究进展。

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