An Investigation on Dynamic Characteristics of a Micro Diaphragm Pump

摘要

Due to the rapid development of semiconductor industry, biomedical engineering, biological and chemical industry, as well as micro-mechatronics system, the global industrial technology trends to the direction of "more precision" and "more small." Different types of micro-actuators are built by micro-precision machining system with extremely high accuracy, precision, and little margin of error allowed. This miniaturization process also highlights the importance of stability and the dynamic error of the micro actuators. For instance, the micro-pump, one of the key components in micro-fluid technology, is used to controlling the behavior of fluid transmission and responding procedures in a micro fluid channel system. This research is to investigate the stability and dynamic characteristics of a micro diaphragm pump by including fluid cavity within the double cantilever beams into the mathematical model. In practical micro-fluid control technology, it is found that poor stability and/or dynamic characteristics of the micro pump may generate larger deviation of micro fluid flow and broader transmission and response errors. Consequently, it will cause erroneous action of the actuator and even damage the micro-fluid system. In this work, the theoretical and numerical analysis is employed to study the fluid structural weak coupling of a micro thin film pump.