A coupled bending-torsion model for electrostatically actuated torsional nano/micro-actuators with considering influence of van der Waals force

摘要

In the current paper, a coupled two degree of freedom model which considers both bending and torsion of the supporting torsion beams is presented for electrostatically actuated torsional nano/micro-actuators under the effect of van der Waals (vdW) force. Newton's second law is utilized for finding the normalized equations governing the static behavior of the actuator. The implict function theorem is then utilized for finding the equations governing the pull-in state of the actuator. The related results show that torsion model considerably overestimates the pull-in parameters of the nano/micro-actuator. The concept of the instability mode is introduced, and it is shown that when the ratio of the bending stiffness to the torsion stiffness of the supporting torsion beams is relatively low, the dominant instability mode of the actuator would be the bending mode and otherwise the dominant instability mode would be the torsion mode. It is also observed that the presence of the vdW force can significantly reduce the pull-in angle and pull-in deflection of the nano/micro-actuator. The presented results also show that the vdW force can lead to considerable reduction in the pull-in voltage of the actuator. The equilibrium behavior of the actuator is studied, and it is observed that the vdW force and also bending of the supporting torsion beams greatly reduce the maximum allowable voltage which can be applied to the actuator. Results of this paper can be used for successful design of electrostatically actuated torsional nano/micro-actuators where the size of the actuator is sufficiently small, and as a result, the vdW force plays a major role in the system.