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Novel soluble polyimides containing pyridine and fluorinated units: preparation, characterization, and optical and dielectric properties

机译:含有吡啶和氟化单元的新型可溶性聚酰亚胺:制备,表征和光学和介电性能

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摘要

To acquire low dielectric constant polyimide films with good mechanical and thermal properties and low coefficient of thermal expansion (CTE) applied in microelectronic fields, as a feasible tactic, three novel diamines containing pyridine and -C(CF3)(2)- groups were firstly designed and synthesized to employ polymerization with 2,2'-bis(3,4-dicarboxyphenyl) hexafluoropropanedianhydride (6FDA) via a two-stage process with a heating imidization method. Three diamine monomers included one unsubstituted pyridine ring, and another two methyl-substituent groups on two pyridine rings at the 6- and 4- position. The structure-property relationships between the different pyridine rings of the fluorinated PI films, including dielectric constant, thermal stability, mechanical strength, optical transparency, and solubility, were systematically investigated. The fluorinated PI films exhibit low dielectric constant in the range of 2.36-2.52 at 1 MHz, while they still display excellent mechanical properties with tensile strengths as high as 114 MPa. Meanwhile, the PI films show good thermal stability with glass transition temperatures (T-g) in the range of 262-275 degrees C, low coefficients of thermal expansion (CTEs) ranging from 64 to 68 ppm degrees C-1 and 5% weight loss temperatures (T-5%) located between 468 degrees C and 499 degrees C. Further, PI films possess outstanding solubility for easy fabrication. Therefore, these types of fluorinated PI films provide a potential application as alternative dielectric layers in future microelectronic technology.
机译:为了获得具有良好的机械和热性能的低介电常数聚酰亚胺膜和施加在微电子场中的低热膨胀系数(CTE),作为可行的策略,含有吡啶和-C(CF3)(2)组的三种新型二胺 - 基团设计和合成以通过用加热酰亚胺化方法通过两级法与2,2'-BIS(3,4-二羧基)六氟丙丙酸酐(6FDA)一起设计和合成。三个二胺单体包括一个未取代的吡啶环,另外两个甲基取代基在6-和4-位的两个吡啶环上。系统地研究了氟化PI膜的不同吡啶环之间的结构性质关系,包括介电常数,热稳定性,机械强度,光学透明度和溶解度。氟化PI膜在1MHz的2.36-2.52的范围内表现出低介电常数,而它们仍然显示出优异的机械性能,其抗拉强度高达114MPa。同时,PI薄膜在262-275摄氏度的范围内(Tg),玻璃化转变温度(Tg)显示出良好的热稳定性,其热膨胀(CTE)的低系数范围为64至68ppm,和5%重量损失温度(T-5%)位于468℃和499℃之间。此外,PI薄膜具有出色的溶解度,便于制造。因此,这些类型的氟化PI膜在未来的微电子技术中提供了作为替代介电层的潜在应用。

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  • 来源
    《RSC Advances》 |2016年第26期|共10页
  • 作者单位

    Liaoning Normal Univ Sch Life Sci Dalian 116081 Peoples R China;

    Liaoning Normal Univ Sch Life Sci Dalian 116081 Peoples R China;

    Liaoning Normal Univ Sch Life Sci Dalian 116081 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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