A technique is proposed for measuring mechanical vibration displacement using a liquid delay line which is composed of two pairs of interdigital transducers (IDTs) on a thin piezoelectric ceramic plate, and a polymer-film diaphragm as one wall of a liquid cavity. The diaphragm functions as an ultrasound-beam reflector. The acoustic delay is linearly dependent on the mechanical displacement of the diaphragm. An experiment for monitoring mechanical vibration has been successfully demonstrated.
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