Polymers of norbornenyl-4-phenol: Dissolution rate characteristics, positive tone photo-patterning, and polymer properties

摘要

Vinyl addition norbornene polymers with phenol pendent groups are obtained by methanolysis of the 4-acetoxyphenyl norbornene polymer. Thin films of this polymer blended with additives such as norbornene polymers with hexafluoroalcohol pendent groups and diazonaphthoquinone compounds result in linear dissolution in tetramethylammonium hydroxide developer. Good resolution, positive tone patterns are obtained from image-wise exposure of thin films of blends of the diazonaphthoquinone additives with both phenol pendent norbornene homopolymer and with norbornene copolymers with both phenol and hexafluoroalcohol pendent groups. Properties such as transparency, dielectric constant, chemical, and thermal resistance were determined for cured copolymer compositions containing an epoxy crosslinker. (C) 2017 Wiley Periodicals, Inc.