首页> 外文期刊>The journal of physical chemistry, C. Nanomaterials and interfaces >UV Light Effect on Cationic Photopolymerization of the SU8 Photoresist and Its Composites with Carbon Nanotubes: New Evidence Shown by Photoluminescence Studies
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UV Light Effect on Cationic Photopolymerization of the SU8 Photoresist and Its Composites with Carbon Nanotubes: New Evidence Shown by Photoluminescence Studies

机译:用碳纳米管的Su8光致抗蚀剂的阳离子光聚合的UV光效应:光致发光研究显示的新证据

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The effect of UV light on the cationic photopolymerization of the SU8 negative photoresist is shown by photoluminescence (PL) studies. Our results demonstrate that the cationic photopolymerization reaction of the SU8 photoresist takes place predominantly under the influence of the UVA light. Using UVA light, the influence of carbon nanotubes [of the types single-walled carbon nanotubes (SWNTs), double-walled carbon nanotubes (DWNTs), multiwalled carbon nanotubes (MWNTs), and SWNTs functionalized with carboxyl groups (SWNTs-COOH)] on the cationic photopolymerization process of the SU8 photoresist is shown by PL studies. The cationic photopolymerization of the SU8 photoresist is monitored by the variations of the two emission bands with maxima at similar to 400-429 nm and 523-556 nm. The increase in the relative intensity of the PL band at similar to 523-556 nm is dependent on (i) the carbon nanotube concentration in the SU8 photoresist matrix; (ii) the type of carbon nanotubes, i.e., SWNTs, DWNTs, and MWNTs; and (iii) the nonfunctionalized and functionalized state of SWNTs. The results reported in this work demonstrate that PL can be used as a complementary method to Raman scattering and IR spectroscopy in the investigation of the cationic photopolymerization reaction of the SU8 negative photoresist. A decrease in the wrapping angle of carbon nanotubes with the SU8 photoresist is highlighted by anisotropic PL studies.
机译:通过光致发光(PL)研究,示出了UV光对SU8负光致抗蚀剂的阳离子光聚合的影响。我们的研究结果表明,SU8光致抗蚀剂的阳离子光聚合反应主要在UVA光的影响下主要发生。使用UVA光,碳纳米管[类型的单壁碳纳米管(SWNT),双壁碳纳米管(DWNT),多壁碳纳米管(MWNT),以及用羧基(SWNTS-COOH)官能化的SWNT的影响]在SU8光致抗蚀剂的阳离子光聚合过程中,PL研究显示。通过两个发射带的变化来监测SU8光致抗蚀剂的阳离子光聚合,Maxima类似于400-429nm和523-556nm。类似于523-556nm的PL带的相对强度的增加取决于(i)SU8光致抗蚀剂基质中的碳纳米管浓度; (ii)碳纳米管的类型,即SWNT,DWNT和MWNT; (iii)瑞氏的非功能化和功能化状态。本文报道的结果表明,PL可以用作拉曼散射和IR光谱的互补方法,研究SU8负光致抗蚀剂的阳离子光聚合反应。通过各向异性PL研究突出了具有SU8光致抗蚀剂的碳纳米管包裹角的减小。

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