On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones

摘要

Highlights ? The maximum theoretical achievable SNR for piezoelectric MEMS microphones is explored. ? A signal energy maximization perspective is taken. ? It is discovered that a maximum SNR may be defined in terms of only microphone size. Abstract A theoretical maximum achievable signal to noise ratio (SNR) for piezoelectric microphones is identified as a function of only microphone volume irrespective of architecture and construction details. For a given piezoelectric material, microphone SNR can be reduced to an expression containing only a dimensionless coupling coefficient and microphone volume. For a given material, the coupling coefficient has a theoretical uppe