Nonlinear operation of resonant sensors based on weakly-coupled resonators: Experimental investigation of an actively-coupled architecture

摘要

This paper is aimed at the validation of a theoretical analysis of the properties of nonlinearly-operated weakly-coupled resonators (WCRs) for resonant sensing applications. In particular, we investigate the relationships between the operating point of such devices and different performance indicators, such as parametric sensitivity, sensitivity to drive level and to noise, and bandwidth. To this end, a couple of high-Q MEMS resonators exhibiting nonlinear restoring and damping forces are used. A careful characterization of the resonators and their associated electronics is made, resulting in a very good, quantitative fit between the experimental results and those predicted by theory. (C) 2019 Elsevier B.V. All rights reserved.