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Line-scan spectrum-encoded imaging by dual-comb interferometry

机译:通过双梳干涉测量法进行线扫描频谱编码成像

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摘要

Herein, the method of spectrum-encoded dual-comb interferometry is introduced to measure a three-dimensional (3-D) profile with absolute distance information. By combining spectral encoding for wavelength-to-space mapping, dual-comb interferometry for decoding and optical reference for calibration, this system can obtain a 3-D profile of an object at a stand-off distance of 114 mm with a depth precision of 12 mu m. With the help of the reference arm, the absolute distance, reflectivity distribution, and depth information are simultaneously measured at a 5 kHz line-scan rate with free-running carrier-envelope offset frequencies. To verify the concept, experiments are conducted with multiple objects, including a resolution test chart, a three-stair structure, and a designed "ECNU" letter chain. The results show a horizontal resolution of similar to 22 mu m and a measurement range of 1.93 mm. (c) 2018 Optical Society of America
机译:这里,引入频谱编码的双梳干涉法的方法,以测量具有绝对距离信息的三维(3-D)轮廓。 通过组合用于波长到空间映射的光谱编码,用于校准的解码和光学参考的双梳干涉测量,该系统可以在114mm的脱扣距离处获得对象的3-D型材,深度精度 12亩。 在参考臂的帮助下,绝对距离,反射率分布和深度信息以5kHz的线路扫描速率同时测量,其具有自由运行的载波信封偏移频率。 为了验证概念,实验是用多个对象进行的,包括分辨率测试图,三个楼梯结构和设计的“ECNU”字母链。 结果显示水平分辨率与22μm的水平分辨率和1.93mm的测量范围。 (c)2018年光学学会

著录项

  • 来源
    《Optics Letters》 |2018年第7期|共4页
  • 作者单位

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

    East China Normal Univ State Key Lab Precis Spect Shanghai 200062 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
  • 关键词

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