Flexible interferometric null testing for concave free-form surfaces using a hybrid refractive and diffractive variable null

摘要

Free-form surfaces have been applied in a wide range of modern optical systems. As a supporting technique for fabricating free-form surfaces, the interferometric null method for testing the surface figure error has very limited flexibility. In this Letter, we report a flexible interferometric null test method which can test free-form surfaces with a very broad departure varying range. In the presented flexible null method, a hybrid refractive and diffractive variable null (HRDVN) is utilized as the flexible null. The HRDVN has superb aberration types adaptability, amplitude adaptability, and moderate phase generating accuracy. A flexible interferometric null testing setup was established using the HRDVN. Its superb adaptive capacity and moderate test accuracy were successfully demonstrated by measuring a free-form surface with rotationally symmetric departure of 173.486 lambda (lambda = 632.8 nm) and non-rotationally symmetric departure of 23.786 lambda. (C) 2019 Optical Society of America