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首页> 外文期刊>Nanotechnology >Solution route to large area all-TiO2 one-dimensional photonic crystals with high reflectivity and different structural colors
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Solution route to large area all-TiO2 one-dimensional photonic crystals with high reflectivity and different structural colors

机译:解决大面积All-TiO2一维光子晶体,具有高反射率和不同的结构颜色

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摘要

In this paper, wafer-scale dense and meosoporous TiO2 films are fabricated via spin-coating and thermal treatment. A photo-curable resin, acrylated polytitanoxane tetramer (Ti-resin), is synthesized as the precursor of TiO2 to deposit dense films. The refractive index of TiO2 films at 500 nm is tuned from 2.17 (dense) to 1.49 (porous) by changing film porosity via adding different amount of polystyrene (PS) to the precursor solvent. A reactive compatibilizer containing one mercapto group and three benzyl rings is synthesized to reduce phase separation and prevent film crack of porous films during the calcinations. The deposition protocol is optimized to prevent infiltration of dense TiO2 layers into porous TiO2 layers. Film thicknesses of both dense and porous TiO2 films can be linearly tuned by changing deposition number. All-TiO2 1D photonic crystals with different structural colors are successfully fabricated on quartz and silicon wafers with reflectivity of at least 90%, covering the spectrum from 400 to 800 nm.
机译:在本文中,通过旋涂和热处理制造晶片级致密和梅多孔TiO2薄膜。可光固化树脂丙烯酸酯化的聚氧烷四聚体(Ti树脂)被合成为TiO2的前体,以沉积致密膜。通过将不同量的聚苯乙烯(PS)加入前体溶剂,通过将薄膜孔隙率改变为1.17(致密)至1.49(多孔),从2.17(致密)至1.49(多孔)调谐。合成含有一个巯基和三个苄基环的反应性增容剂,以减少煅烧过程中的相分离并防止多孔膜的膜裂纹。优化沉积方案以防止致密TiO2层渗透到多孔TiO 2层中。致密和多孔TiO 2膜的膜厚度可以通过改变沉积数来线性调节。 All-TiO2 1D具有不同结构颜色的光子晶体在石英和硅晶片上成功制造,反射率至少为90%,覆盖400至800nm的光谱。

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