Investigation of SF_6 Injection During Cyclic C_2H_2/SF_6 Flow for the Formation of Geometrically Controlled Carbon Coils

摘要

Carbon coils could be synthesized using C_2H_2/H_2 as source gases along with SF_6 as an incorporated additive gas using a thermal chemical vapor deposition (CVD) system. To obtain geometrically controlled carbon coils, a cyclic process, namely the turning on and off of C_2H_2 or SF_6 flow during the initial reaction stage, was carried out. According to the different reaction processes, different interruption/injection times of C_2H_2 or SF_6 flow and different injection sequences of the gas flow were investigated while maintaining the identical overall injection time of C_2H_2 and/or SF_6 flow. The formation of carbon microcoils (CMCs) is favored by the lowest interruption/injection time ratio of SF_6 flow within one cycle. In addition, the injection of SF_6 flow prior to the injection of C_2H_2 flow promotes the formation of CMCs. Based on these results we revealed the role of the SF_6 flow injection for the enhanced formation of geometrically controlled CMCs. The etching of materials, thereby promoting an increase in the number of nucleation sites for the survived growth species to form CMCs, by the increased fluorine concentration, originating from the dominant SF_6 influx, is understood to be the main cause for the exclusive CMCs formation.