A study of the deposition process of multilayer coatings on the inner tube surface with the pulsed laser deposition technique

摘要

The multilayer Ti/TiN/Ti coatings (consisting of nano-scale layers) on the inner surface of stainless steel tubes of small diameter were studied. The coatings were deposited by using the pulsed laser deposition (PLD) technique (in the reactive and non-reactive deposition modes). The coatings were analyzed using the X-ray fluorescence analysis with total external reflection (TXRF) and the Rutherford backscattering spectroscopy (RBS). It was found that the deposition of multilayer Ti/TiN/Ti coatings leads to the essential mixing of coating layers due to sputtering of coatings with fast atoms and ions from the laser plume and the evaporation of the coating under the laser radiation reflected from the target surface.