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首页> 外文期刊>Journal of Applied Polymer Science >Cashew nut shell liquid based t-BOC protected alternating 'High Ortho' copolymer as a possible e-beam resist: Characterization using multi-dimensional NMR spectroscopy
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Cashew nut shell liquid based t-BOC protected alternating 'High Ortho' copolymer as a possible e-beam resist: Characterization using multi-dimensional NMR spectroscopy

机译:基于腰果壳液体的t-BOC保护的交替“高邻位”共聚物作为可能的电子束抗蚀剂:使用多维NMR光谱进行表征

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摘要

A card anol/m-cresol-based copolymer was esterified using di-tert-butyl dicarbonate (t-BOC), which makes it a suitable candidate as a possible e-beam resists. This work reports a full characterization of the product using the techniques of FTIR and UV-Visible spectroscopy, one dimensional H-1 NMR, C-13 NMR, DEPT-135. Two dimensional NMR experiments such as, COSY, HSQC, and HMBC have been employed for exhaustive probing of the microstructural details of this derivatized copolymer. (c) 2008 Wiley Periodicals, Inc.
机译:使用二碳酸二叔丁酯(t-BOC)酯化了基于醇/间甲酚的共聚物,这使其成为可能的电子束抗蚀剂的合适候选物。这项工作报告了使用FTIR和紫外可见光谱技术,一维H-1 NMR,C-13 NMR,DEPT-135技术对产品的完整表征。二维NMR实验(例如COSY,HSQC和HMBC)已用于详尽探测这种衍生化共聚物的微观结构细节。 (c)2008年Wiley Periodicals,Inc.

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