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Ablation of PEDOT/PSS with excimer lasers for micro structuring of organic electronic devices

机译:用准分子激光烧蚀PEDOT / PSS,用于有机电子设备的微结构化

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摘要

In this paper we present a potentially fast method for high resolution micro structuring of organic electronics via laser patterning. An investigation of the absorption spectrum in the UV/VIS regime of poly (3,4-ethylene dioxythiophene) poly (styrene-sulfonate) (PEDOT/PSS) has shown that UV-laser radiation should be used for optimal laser ablation of the material. Hence, the ablation characteristics of PEDOT/PSS with two different excimer lasers are compared with each other. The optimal fluence for the ablation of the material has been determined. The lasers used in this study are ArF (X = 193 nm) and KrF (a = 248 nm) excimer lasers.
机译:在本文中,我们提出了一种潜在的快速方法,可通过激光图案化对有机电子器件进行高分辨率微结构化。对聚(3,4-乙撑二氧噻吩)聚苯乙烯磺酸酯(PEDOT / PSS)在UV / VIS范围内的吸收光谱的研究表明,应使用UV激光辐射对材料进行最佳激光烧蚀。因此,将两种不同的准分子激光器对PEDOT / PSS的烧蚀特性进行了比较。已经确定了用于材料烧蚀的最佳能量密度。本研究中使用的激光器是ArF(X = 193 nm)和KrF(a = 248 nm)准分子激光器。

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