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Fabrication of highly uniform and porous MgF_2 anti-reflective coatings by polymer-based sol-gel processing on large-area glass substrates

机译:通过基于聚合物的溶胶-凝胶工艺在大面积玻璃基板上制备高度均匀且多孔的MgF_2多孔抗反射涂层

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摘要

Despite recent progress in the fabrication of magnesium fluoride (MgF_2) anti-reflective coatings (ARCs), simple, effective and scalable sol-gel fabrication of MgF_2 ARCs for large-area glass substrates has prospective application in various optoelectronic devices. In this paper, a polymer-based sol-gel route was devised to fabricate highly uniform and porous MgF_2 ARCs on large-area glass substrates. A sol-gel precursor made of polyvinyl acetate and magnesium trifluoroacetate assisted in the formation of uniformly mesoporous MgF_2 ARCs on glass substrates, leading to the attainment of a refractive index of ~1.23. Systematic optimization of the thickness of the ARC in the sub-wavelength regime led to achieving ~99.4% transmittance in the case of the porous MgF_2 ARC glass. Precise control of the thickness of porous MgF_2 ARC glass also resulted in a mere ~0.1% reflection, virtually eliminating reflection off the glass surface at the target wavelength. Further manipulation of the thickness of the ARC on either side of the glass substrate led to the fabrication of relatively broadband, porous MgF_2 ARC glass.
机译:尽管在氟化镁(MgF_2)减反射涂层(ARC)的制造方面取得了最新进展,但用于大面积玻璃基板的MgF_2 ARC的简单,有效和可扩展的溶胶凝胶制造在各种光电设备中都有前瞻性的应用。在本文中,设计了一种基于聚合物的溶胶-凝胶路线,以在大面积玻璃基板上制造高度均匀且多孔的MgF_2 ARC。由聚乙酸乙烯酯和三氟乙酸镁制成的溶胶-凝胶前体有助于在玻璃基板上形成均匀的介孔MgF_2 ARC,从而使折射率达到〜1.23。在亚波长范围内,对ARC厚度的系统优化使多孔MgF_2 ARC玻璃的透射率达到了约99.4%。精确控制多孔MgF_2 ARC玻璃的厚度还导致反射率仅为〜0.1%,实际上消除了目标波长下玻璃表面的反射。在玻璃基板任一侧上对ARC厚度的进一步控制导致了相对宽带的多孔MgF_2 ARC玻璃的制造。

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